万级微电子净化生产车间
Microelectronics workshop of 10000-class
验收测试数据
■ 温度:22±2℃
■ 湿度:55±5%
■ 噪音:≤56db
■ 面积:1500m2
■ 施工期:40天
Testing data in check and acc j ept procedure
■ Temperature:22±2℃
■ Humidity: 55±5%
■ Noise: ≤56db
■ Area:1500 m2
■ Construction period:40 Day