The all-new Precis® 200 incorporates the most advanced design and technology from VIEW-MM. Based on the proven Innova wafer metrology system from Micro-Metric, the new Precis includes a number of configurable options that make the system more versatile, serviceable and reliable:
Extended Z-axis range – 2.5mm, 5mm or 100mm
Transmitted illumination
Integral electronics drawer – fully compliant with SEMI S2 and CE standards
Ergonomic operator control station with hide-away keyboard tray, adjustable height and angle for control panel and display monitor, SEMI S8 compliant
Fully automated microscope with all settings computer controlled
Megapixel camera for optimum resolution
VIEW Metrology Software (VMS™) allows a wide range of components to be measured, with the option of CAD translation and full geometric dimensioning and tolerancing.
MMWin – wafer and mask metrology software – ideal for critical dimension and overlay registration measurement for wafers, slider ABS, photomask and flat panel displays.
Standard Optional
X,Y,Z travel (mm): 200 x 200 x 5 200 x 200 x 100
Max Recommanded load: 12 kg
XY Linear Accuracy: E1=(0.25+2L/1000)um
Z Linear Accuracy: E1=(0.25)um (with use of a 100X lens)